FemtoScan

	Overall view of FemtoScan mechanical system
	The main base of the mechanical system (precise piezoscanner and step motor are inside the tubular box)
	FemtoScan STM option
	FemtoScan AFM option

FemtoScan STM was launched on 28.04.1997

FemtoScan Specifications

FemtoScan AFM/STM main base
True vertical probe/sample initial approach
Initial approach — step motor
Initial approach range — up to 4 mm
Initial approach step size — 30 nm
Typical thermal drift — less than 1 nm/s
Sample position — horizontal
Sample size — up to 15 mm in diameter, 5 mm in height
Scan size — 2 m or 10 m
Scan rate — up to 30 Hz
Sample holder — magnetic

FemtoScan STM Head
Height, Deflection, I(U), I(Z) Modes
Interleave, DualTrace, Lithography Modes
Tunnel current ranges — 10 pA - 20 nA, 0.01 pA - 1 nA
Bias voltage ±10 V
Tip diameter 0. 1 - 0.4 mm
Resolution atomic on graphite

FemtoScan AFM Head
Height, Deflection and Friction Modes
Resolution — atomic on mica
Resonant Modes (semi-contact)
Lift, Interleave, DualTrace, Lithography Modes

FemtoScan Controller Electronics
Data and feedback control using Digital Signal Processor with a 133 MHz frequency for arithmetic operations
X, Y, and Z high voltage amplifiers with ±135 V output range
Four precise DACs with 16 bit resolution and 10 ms acquisition time for X, Y, Z, and U signals, 12 optional DACs
Two input ADCs with 16 bit resolution and 10 ms acquisition time
Tunnel voltage amplifier with ±10 V output range

FemtoScan Sample Heater (optional)
Temperature rate — up to 80 ^oC
Temperature accuracy — 0,05 ^oC
Thermal drift during heating (max):
— 100 nm/ ^oC (normal direction), 40 nm/ ^oC (lateral direction)